SEMI F95 : OCT 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
Sets up the properties and physical of two port components for 1.5 inch type surface mount gas distribution systems.
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