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SEMI F82 : 2012

SEMI F82 : 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER/MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up the properties and physical dimensions of mass flow controllers and mass flow meters for 1.125 inch type surface mount gas distribution systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI (02/2004) Supersedes SEMI PR3. (09/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI F102 : 2006(R2013) GUIDE FOR SELECTING SPECIFICATIONS FOR DIMENSION OF COMPONENTS FOR SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

SEMI F20 : 2006E(R2017) SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI E49.8 : 2003(R2011) GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

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