Customer Support: 131 242

i2i Intertek.com
  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Go to AMERICAS site
Dismiss alert
Please enter a keyword to search
Advanced search
Home
SEMI
SEMI F32 : 2011

SEMI F32 : 2011

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING OF FLOW COEFFICIENT FOR HIGH PURITY SHUTOFF VALVES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies how to determine two criteria used in selecting valves of appropriate size for gases and liquids.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E49.5 : 2004 GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI F101 : 2005(R2011)E TEST METHODS FOR DETERMINING PRESSURE REGULATOR PERFORMANCE IN GAS DISTRIBUTION SYSTEMS
SEMI F4 : 2011 SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER VALVES

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Learn more on subscription solutions

or

Get in touch with us

Need help?
Call us on 131 242, then click here to start a Screen Sharing session
so we can help right away! Learn more