Customer Support: 131 242

  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Dismiss alert

SEMI F72 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE PAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

Superseded date

08-03-2021

Published date

12-01-2013

Specifies a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS

SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
SEMI F60 : 2014 TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Need help?
Call us on 131 242, then click here to start a Screen Sharing session
so we can help right away! Learn more