Name: SEMI F60 : 2014
Brand: SEMI

TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a method for testing passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS

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SEMI F60 : 2014

TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

Abstract

General Product Information

Standards Referenced By This Book

Standards Referencing This Book

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