SEMI MF1049:2008(R2013)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
PRACTICE FOR SHALLOW ETCH PIT DETECTION ON SILICON WAFERS
15-12-2023
08-11-2018
Specifies detect shallow etch pits that may be related to the level of metallic impurities near the surface of silicon epitaxial or polished wafers.
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