SEMI MF1049:2008(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Practice for Shallow Etch Pit Detection on Silicon Wafers
Hardcopy
15-12-2023
English
01-10-2018
This Practice covers detection of high densities of shallow etch pits on silicon wafers doped either p- or n-type and with resistivities as low as 0.005 Ω·cm.
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