SEMI MF1771 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR EVALUATING GATE OXIDE INTEGRITY BY VOLTAGE RAMP TECHNIQUE
09-12-2021
12-01-2013
Pertains to standardize the procedure, analysis and reporting of oxide integrity data via the voltage ramp technique among interested parties.
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