SEMI MF374 :2012(R2018)

Name: SEMI MF374 :2012(R2018)
Brand: SEMI
Price: 245.53 AUD

Superseded

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TEST METHOD FOR SHEET RESISTANCE OF SILICON EPITAXIAL, DIFFUSED, POLYSILICON, AND ION-IMPLANTED LAYERS USING AN IN-LINE FOUR-POINT PROBE WITH THE SINGLE-CONFIGURATION PROCEDURE

Available format(s)

Hardcopy

Superseded date

17-11-2023

Language(s)

English

Published date

08-11-2018

Publisher

Semiconductor Equipment & Materials Institute

Covers sheet resistance of silicon epitaxial, diffused, and implanted layers is an important materials acceptance and process control parameter.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType	Revision
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF374:2012(R2023)

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