SEMI MF525 : 2012

Name: SEMI MF525 : 2012
Brand: SEMI
Price: 251.14 AUD

Superseded

View Superseded by

TEST METHOD FOR MEASURING RESISTIVITY OF SILICON WAFERS USING A SPREADING RESISTANCE PROBE

Available format(s)

Hardcopy

Superseded date

17-11-2023

Language(s)

English

Published date

04-08-2018

Publisher

Semiconductor Equipment & Materials Institute

Gives means for directly determining the resistivity of a substrate or of an epitaxial layer of thickness > 20 times the effective electrical contact radius.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType	Revision
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF525:2012(R2018)

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