BS EN 62047-1:2006
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Hardcopy , PDF
01-05-2016
English
29-09-2006
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
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