SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE-TESTING

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

01-01-2007

Publisher

German Institute for Standardisation (Deutsches Institut für Normung)

Scope
2 Normative references
3 Test piece materials
4 Test piece fabrications
5 Plane shape of test piece
6 Test piece thickness
7 Gauge mark
8 Test
9 Document attached to standard test pieces
Annex A (informative) Test piece
Annex ZA (normative) Normative references to international
publications with their corresponding European
publications

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.

DevelopmentNote	Supersedes DIN IEC 62047-3. (02/2007)
DocumentType	Standard
Pages	9
PublisherName	German Institute for Standardisation (Deutsches Institut für Normung)
Status	Current
Supersedes	DIN IEC 62047-3:2004-08 (Draft)

Standards	Relationship
NBN EN 62047-3 : 2007	Identical
I.S. EN 62047-3:2006	Identical
NF EN 62047-3 : 2006	Identical
EN 62047-3 : 2006	Identical
IEC 62047-3:2006	Identical
BS EN 62047-3:2006	Identical