SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING

Published date

12-01-2013

Publisher

AVANT-PROPOS
1 Domaine d'application
2 Références normatives
3 Matériaux des éprouvettes d'essai
4 Fabrications des éprouvettes d'essai
5 Forme plane de l'éprouvette d'essai
6 Epaisseur de l'éprouvette d'essai
7 Marque repère
8 Essai
9 Document joint aux éprouvettes d'essai normalisées
Annexe A (informative) Eprouvette d'essai
Annexe ZA (normative) Références normatives à d'autres
publications internationales avec les
publications européennes correspondantes

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.

DevelopmentNote	Indice de classement: C96-050-3 PR NF EN 62047-3 June 2005. (06/2005)
DocumentType	Standard
PublisherName	Association Francaise de Normalisation
Status	Current

Standards	Relationship
DIN EN 62047-3:2007-02	Identical
IEC 62047-3:2006	Identical
EN 62047-3 : 2006	Identical
I.S. EN 62047-3:2006	Identical
BS EN 62047-3:2006	Identical

View more information

Sorry this product is not available in your region.

Access your standards online with a subscription

Features

Simple online access to standards, technical information and regulations.
Critical updates of standards and customisable alerts and notifications.
Multi-user online standards collection: secure, flexible and cost effective.

Learn more on subscription solutions

Get in touch with us

NF EN 62047-3 : 2006

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING

Table of Contents

Abstract

General Product Information

International Equivalents

Category

Subcategory