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SEMI C10 : 2009(R2014)

SEMI C10 : 2009(R2014)

Current

Current

The latest, up-to-date edition.

GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a minimal set of guidelines for the quantitative determination of a method detection limit (MDL) from data supporting a SEMI Process Chemicals or Gases specification.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes and includes SEMI C10.1. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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SEMI C16 : 1999(R2005) GUIDE FOR PRECISION AND DATA REPORTING PRACTICES

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