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SEMI PV49 : 2013(R2018)

SEMI PV49 : 2013(R2018)

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR THE MEASUREMENT OF ELEMENTAL IMPURITY CONCENTRATIONS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY BULK DIGESTION, INDUCTIVELY COUPLED-PLASMA MASS SPECTROMETRY

Published date

08-11-2018

Publisher

Semiconductor Equipment & Materials Institute

Contains the quantitative determination of bulk trace dopant and metal contamination of crystalline, and amorphous silicon chunks using an acid mixture to dissolve the silicon matrix and analytes.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI MF43 : 2016 TEST METHOD FOR RESISTIVITY OF SEMICONDUCTOR MATERIALS
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