Name: SEMI D3 : 1991(R2009)
Brand: SEMI

QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes various areas on the pattern surface of a flat panel display substrate and describes their relationship. Also assumes the existence of terminology and a banking convention described in other SEMI flat panel display documents.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI D13 : 2008(R2013)	TERMINOLOGY FOR FPD COLOR FILTERS ASSEMBLIES
SEMI D9 : 2003(R2015)	TERMINOLOGY FOR FPD SUBSTRATES
SEMI D24 : 2000(R2006)	SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D5 : 1994(R2003)	STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D12 : 1995(R2003)	SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES
SEMI D11 : 1995(R2009)	SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
SEMI D18 : 1999E	SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES
SEMI D15 : 1996(R2003)	FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD

SEMI D9 : 2003(R2015)

TERMINOLOGY FOR FPD SUBSTRATES

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SEMI D3 : 1991(R2009)

QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES

Abstract

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Standards Referencing This Book

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