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SEMI D9 : 2003(R2015)

SEMI D9 : 2003(R2015)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TERMINOLOGY FOR FPD SUBSTRATES

Superseded date

08-03-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI D44 : 2006E SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL
SEMI D25 : 2000E(R2006) SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI F51 : 2017 GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D40 : 2004 TERMINOLOGY FOR FPD SUBSTRATE DEFLECTION
SEMI D49 : 2007 SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION
SEMI D52 : 2008E SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID
SEMI D11 : 1995(R2009) SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
SEMI D48 : NOV 2007 SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL
SEMI D18 : 1999E SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES
SEMI D15 : 1996(R2003) FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD

SEMI D5 : 1994(R2003) STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D15 : 1996(R2003) FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD
SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D11 : 1995(R2009) SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
SEMI D12 : 1995(R2003) SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES
SEMI D7 : 1994(R2003) FPD GLASS SUBSTRATE SURFACE ROUGHNESS MEASUREMENT METHOD

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