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SEMI E100 : 2004(R2010)

SEMI E100 : 2004(R2010)

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Current

The latest, up-to-date edition.

SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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