Name: SEMI E19.4 : 2017
Brand: SEMI

SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies one approach to interfacing a clean cassette transport box to a clean environmental housing on a piece of semiconductor processing equipment or to other clean environments.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (01/2005) No longer published within the SEMI E19 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E146 : 2006	TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS
SEMI E57 : 2000E2(R2010)	SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
SEMI E100 : 2004(R2010)	SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
SEMI E106 : 2004	OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
SEMI E117 : 2017	SPECIFICATION FOR RETICLE LOAD PORT
SEMI S28 : 2011	SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E47 : 2001(R2006)	SPECIFICATION FOR 150 MM/200 MM POD HANDLES
SEMI E152 : 2014	MECHANICAL SPECIFICATION OF EUV POD FOR 150 MM EUVL RETICLES