SEMI E125 : 2014

Name: SEMI E125 : 2014
Brand: SEMI

Superseded

SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)

Superseded date

11-05-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Includes SEMI E125.1. (06/2003)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI E125:2022

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SEMI E132.1 : 2014	SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA)
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SEMI E121 : 2017	GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E145 : 2014	CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

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