Customer Support: +44 (0)203 327 3140

Login to i2i Subscription Intertek.com
  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Go to AMERICAS site
Dismiss alert
Please enter a keyword to search
Advanced search
Home
Publishers
SEMI
SEMI E164 : 2014

SEMI E164 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR EDA COMMON METADATA

Superseded date

10-08-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (09/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E172 : 2018 SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
SEMI E168 : 2015 SPECIFICATION FOR PRODUCT TIME MEASUREMENT

SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E134 : 2014 SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E148 : 2009(R2014) SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT
SEMI E128 : 2014 SPECIFICATION FOR XML MESSAGE STRUCTURES
SEMI E120 : 2014 SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
SEMI E138 : 2017 SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI E125 : 2014 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E132 : 2015 SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E145 : 2014 CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Learn more on subscription solutions

or

Get in touch with us