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SEMI E148 : 2009(R2014)

SEMI E148 : 2009(R2014)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the TS-Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and specifies which protocol to use for precise time synchronization of clocks in factory environments that use network communication.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (06/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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