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SEMI E94 : 2014

SEMI E94 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR CONTROL JOB MANAGEMENTT

Superseded date

05-04-2024

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies equipment provided services to the factory that supports a high level of factory automation.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E94.1. (07/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E94.1 : 2007 SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM)
SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E134.1 : 2014 SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM)
SEMI E134 : 2014 SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E174 : 2017 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
SEMI E126 : 2008(R2018) SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP)
SEMI E130 : 2017 SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI E168 : 2015 SPECIFICATION FOR PRODUCT TIME MEASUREMENT
SEMI E170 : DEC 2017 SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI HB4 : 2013 SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)
SEMI E171 : FEB 2016 SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)
SEMI G66:1996(R2023) Test Method for the Measurement of Water Absorption Characteristics for Semiconductor Plastic Molding Compounds
SEMI E126:2008(R2023) Specification for Equipment Quality Information Parameters (EQIP)
SEMI E87:2023 Specification for Carrier Management (CMS)

SEMI E39.1 : 2003(R2014) SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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