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SEMI E170 : DEC 2017

SEMI E170 : DEC 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)

Superseded date

04-05-2019

Published date

04-08-2014

Publisher

Semiconductor Equipment & Materials Institute

Specifies a standardized 'secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment' which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (08/2014) Includes SEMI E170.1. (02/2015)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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