Name: SEMI E39.1 : 2003(R2014)
Brand: SEMI

SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to all implementations of Object Services that use the SECS-II message protocol (SEMI E5) and provide general terminology, conventions, and notation for describing behaviour and data in terms of objects and object attributes.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E39. (11/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E90 : 2012(R2018)	SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E94.1 : 2007	SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM)
SEMI E98.1 : NOV 2002(R2009)	PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL
SEMI E53 : 2004	EVENT REPORTING
SEMI E87.1 : 2017	PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS)
SEMI E127.1 : 2008	SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)
SEMI E40 : 2013	STANDARD FOR PROCESSING MANAGEMENT
SEMI E94 : 2014	SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E142 : MAR 2006	SPECIFICATION FOR SUBSTRATE MAPPING

SEMI E39 : 2003(R2014)

OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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SEMI E39.1 : 2003(R2014)

SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)

Abstract

General Product Information

Standards Referenced By This Book

Standards Referencing This Book

Category

Subcategory