SEMI E142 : MAR 2006
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SUBSTRATE MAPPING
Superseded date
05-10-2020
Published date
12-01-2013
Specifies the data items that are required to report, store and transmit map data for substrates such as wafers, frames, strips and trays.
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