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SEMI E174 : 2017

SEMI E174 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)

Superseded date

08-11-2018

Published date

02-01-2017

Publisher

Semiconductor Equipment & Materials Institute

Specifies a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2016)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E118 : NOV 2004E SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E142 : MAR 2006 SPECIFICATION FOR SUBSTRATE MAPPING
SEMI E40.1 : 2013 SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
SEMI T7 : 2016 SPECIFICATION FOR BACK SURFACE MARKING OF DOUBLE-SIDE POLISHED WAFERS WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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