Name: SEMI E127.1 : 2008
Brand: SEMI

SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of IMMC to SECS-2 streams and functions and data definitions. Applies to all implementations of IMMC that use the SECS-2 message protocol (SEMI E5).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI (02/2004) Not available separately, Published within the SEMI E127 family of standards. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E90.1 : 2011	SPECIFICATION FOR SECS-2 PROTOCOL SUBSTRATE TRACKING
SEMI E127 : 2008	SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)
SEMI E39.1 : 2003(R2014)	SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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SEMI E127.1 : 2008

SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)

Abstract

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