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SEMI E98.1 : NOV 2002(R2009)

SEMI E98.1 : NOV 2002(R2009)

Current

Current

The latest, up-to-date edition.

PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the services and data of SEMI E98 Object-Based Equipment Model (OBEM) to SECS-II streams and functions and data definitions.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E98 family of standards. (02/2009) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E39.1 : 2003(R2014) SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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