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SEMI E158 : 2014

SEMI E158 : 2014

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Current

The latest, up-to-date edition.

MECHANICAL SPECIFICATION FOR FAB WAFER CARRIER USED TO TRANSPORT AND STORE 450 MM WAFERS (450 FOUP) AND KINEMATIC COUPLING

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E154 : 2014 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
SEMI E156 : 2015 SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT
SEMI M49 : 2016 GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS
SEMI M52 : 2014 GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS
SEMI M80 : 2016 SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS

SEMI E144 : 2012 SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
SEMI M74 : 2008(R2018) SPECIFICATION FOR 450 MM DIAMETER MECHANICAL HANDLING POLISHED WAFERS

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