Name: SEMI E159 : 2014
Brand: SEMI

MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (07/2011)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI M49 : 2016	GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS
SEMI E156 : 2015	SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT
SEMI M52 : 2014	GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS

SEMI E1-9 : NOV 2006E	MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E144 : 2012	SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
SEMI E154 : 2014	MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
SEMI M74 : 2008(R2018)	SPECIFICATION FOR 450 MM DIAMETER MECHANICAL HANDLING POLISHED WAFERS
SEMI E30.1 : 2017	SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)

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SEMI E159 : 2014