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SEMI E37 : 2013

SEMI E37 : 2013

Current

Current

The latest, up-to-date edition.

HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (08/2005) Includes SEMI E37.1. (06/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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