Name: SEMI E56 : 2017
Brand: SEMI

TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a standardized method to quantify the accuracy, linearity, repeatability, short-term reproducibility, hysteresis, and dead band of a thermal mass flow controller (MFC).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E56 : 2017

TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS

Abstract

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