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SEMI E58 : JUL 2003

SEMI E58 : JUL 2003

Current

Current

The latest, up-to-date edition.

AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies various terms and equipment states but was not written specifically for application by automated equipment, consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E58.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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