SEMI MF1392:2007(R2012)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe
Hardcopy
17-11-2023
English
01-01-2012
This Test Method covers the measurement of net carrier density and net carrier density profiles in epitaxial and polished bulk silicon wafers in the range from about 4 × 1013 carriers/cm3 to about 8 × 1016 carriers/cm3 (resistivity range from about 0.1 Ω·cm to about 100 Ω·cm in n-type wafers and from about 0.24 Ω·cm to about 330 Ω·cm in p-type wafers).
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