SEMI MF1392:2007

Name: SEMI MF1392:2007
Brand: SEMI
Price: 125.22 GBP

Superseded

View Superseded by

TEST METHOD FOR DETERMINING NET CARRIER DENSITY PROFILES IN SILICON WAFERS BY CAPACITANCE-VOLTAGE MEASUREMENTS WITH A MERCURY PROBE

Available format(s)

Hardcopy

Superseded date

17-11-2023

Language(s)

English

Published date

04-08-2018

Publisher

Semiconductor Equipment & Materials Institute

Describes a means for determining net carrier density without formation of a special diode structure on the layer.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2003) Also available in CD-ROM. (02/2007)
DocumentType	Revision
ISBN	00
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF1392:2007(R2012) SEMI MF1392:2007(R2023)

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