SEMI MF525:2012(R2018)

Name: SEMI MF525:2012(R2018)
Brand: SEMI
Price: 145.16 GBP

Superseded

View Superseded by

Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

Available format(s)

Hardcopy

Superseded date

17-11-2023

Language(s)

English

Published date

01-07-2018

Publisher

Semiconductor Equipment & Materials Institute

This Test Method covers the measurement of the resistivity of a silicon substrate of known orientation and type, or of a uniform silicon epitaxial layer of known orientation and type that is deposited on a substrate of the same or opposite type.

DocumentType	Test Method
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF525:2012(R2023)
Supersedes	SEMI MF525 : 2012

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