EN ISO 14644-9:2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)
06-14-2022
08-15-2012
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Surface characteristics
Annex B (informative) - Descriptor for specific particle
size ranges
Annex C (informative) - Parameters influencing the SCP
classification
Annex D (informative) - Measurement methods for determining
surface cleanliness by particle concentration
Bibliography
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