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SEMI E43 : 2013

SEMI E43 : 2013

Current

Current

The latest, up-to-date edition.

RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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