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SEMI E163 : 2012(R2017)

SEMI E163 : 2012(R2017)

Current

Current

The latest, up-to-date edition.

GUIDE FOR THE HANDLING OF RETICLES AND OTHER EXTREMELY ELECTROSTATIC SENSITIVE (EES) ITEMS WITHIN SPECIALLY DESIGNATED AREAS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E78 : 2012 GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
SEMI E43 : 2013 RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES
SEMI E129 : 2012 GUIDE TO ASSESS AND CONTROL ELECTROSTATIC CHARGE IN A SEMICONDUCTOR MANUFACTURING FACILITY

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