Name: SEMI E129 : 2012
Brand: SEMI

GUIDE TO ASSESS AND CONTROL ELECTROSTATIC CHARGE IN A SEMICONDUCTOR MANUFACTURING FACILITY

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives minimum negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing environments.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2003)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E129 : 2012