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ISO/TR 19319:2013

ISO/TR 19319:2013

Current

Current

The latest, up-to-date edition.

Surface chemical analysis Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

03-06-2013

Publisher

International Organization for Standardization

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

DocumentType
Technical Report
Pages
116
PublisherName
International Organization for Standardization
Status
Current
Supersedes

Standards Relationship
SAC GB/T 29556 : 2013 Identical
PD ISO/TR 19319:2013 Identical
NEN NPR ISO/TR 19319 : 2004 Identical

PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
15/30291643 DC : 0 BS ISO 18516 - SURFACE CHEMICAL ANALYSIS - DETERMINATION OF LATERAL RESOLUTION AND SHARPNESS IN BEAM BASED METHODS
BS ISO 18516:2006 Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
BS ISO 15471:2004 Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
ISO/TR 10993-22:2017 Biological evaluation of medical devices — Part 22: Guidance on nanomaterials
ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
09/30184131 DC : 0 BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION
ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
PD ISO/TR 14187:2011 Surface chemical analysis. Characterization of nanostructured materials
BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction
ISO 15471:2016 Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters
09/30191895 DC : 0 BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS
ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
ISO 29081:2010 Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction
PD ISO/TR 10993-22:2017 Biological evaluation of medical devices Guidance on nanomaterials
ISO/TR 14187:2011 Surface chemical analysis Characterization of nanostructured materials

ISO 22493:2014 Microbeam analysis Scanning electron microscopy Vocabulary
ISO 9335:2012 Optics and photonics — Optical transfer function — Principles and procedures of measurement
ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
ASTM E 1217 : 2011 : REDLINE Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
ISO 9334:2007 Optics and photonics Optical transfer function Definitions and mathematical relationships
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

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Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
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