Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods

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Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

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English, English - French

Published date

10-24-2016

Publisher

International Electrotechnical Committee

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
5 Sampling plan
6 Test methods
7 Identification, labelling, packaging, delivery condition
8 Measurement of Curie temperature
9 Measurement of lattice constant (Bond method)
10 Measurement of face angle by X-ray
11 Measurement of bulk resistivity
12 Visual inspections - Front surface inspection method
Annex A (normative) - Expression using Euler angle description
for piezoelectric single crystals
Annex B (informative) - Manufacturing process for SAW wafers
Bibliography

IEC 62276:2016 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators. This edition includes the following significant technical changes with respect to the previous edition:
- Corrections of Euler angle indications in Table 1 and axis directions in Figure 3.
- Definition of "twin" is not explained clearly enough in 3.3.3. Therefore it is revised by a more detailed definition.
- Etch channels maximum number at quartz wafer of seed which do not pass through from surface to back surface are classified for three grades in 4.2.13 a). Users use seed portions of quartz wafers for devices. They request quartz wafers with less etch channels in seeds to reduce defects of devices. The classification of etch channels in seed may prompt a rise in quartz wafer quality.

Committee	TC 49
DevelopmentNote	Supersedes IEC PAS 62276 (05/2005) Stability Date: 2018. (10/2016)
DocumentType	Standard
Pages	39
PublisherName	International Electrotechnical Committee
Status	Current
Supersedes	IEC 62276:2012 IEC PAS 62276:2001

Standards	Relationship
NEN EN IEC 62276 : 2016	Identical
PN EN 62276 : 2017	Identical
SN EN 62276 : 2016	Identical
UNE-EN 62276:2016	Identical
BS EN 62276:2016	Identical
CEI EN 62276 : 2013	Identical
EN 62276:2016	Identical
DIN EN 62276:2015-04 (Draft)	Identical

IEC 63041-2:2017	Piezoelectric sensors - Part 2: Chemical and biochemical sensors
I.S. EN IEC 63041-1:2018	PIEZOELECTRIC SENSORS - PART 1: GENERIC SPECIFICATIONS
EN IEC 63041-1:2018	Piezoelectric sensors - Part 1: Generic specifications
IEC TS 61994-4-4:2010	Piezoelectric and dielectric devices for frequency control and selection - Glossary - Part 4-4: Materials - Materials for surface acoustic wave (SAW) devices
DD IEC/TS 61994-4-4:2010	Piezoelectric and dielectric devices for frequency control and selection. Glossary Materials Materials for surface acoustic wave (SAW) devices
I.S. EN IEC 63041-2:2018	PIEZOELECTRIC SENSORS - PART 2: CHEMICAL AND BIOCHEMICAL SENSORS
IEC 63041-1:2017	Piezoelectric sensors - Part 1: Generic specifications
EN IEC 63041-2:2018	Piezoelectric Sensors - Part 2: Chemical and Biochemical Sensors

ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
IEC 61019-1:2004	Surface acoustic wave (SAW) resonators - Part 1: Generic specification
IEC 60862-1:2015	Surface acoustic wave (SAW) filters of assessed quality - Part 1: Generic specification
IEC 60758:2016	Synthetic quartz crystal - Specifications and guidelines for use
IEC 61019-2:2005	Surface acoustic wave (SAW) resonators - Part 2: Guide to the use
IEC 60862-2:2012	Surface acoustic wave (SAW) filters of assessed quality - Part 2: Guidelines for the use
IEC 60862-3:2003	Surface acoustic wave (SAW) filters of assessed quality - Part 3: Standard outlines
IEC 61019-3:1991	Surface acoustic wave (SAW) resonators - Part 3: Standard outlines and lead connections

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IEC 62276:2016

Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods

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Abstract

General Product Information

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Standards Referenced By This Book

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