SEMI M83 : 2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR DETERMINATION OF DISLOCATION ETCH PIT DENSITY IN MONOCRYSTALS OF 3-5 COMPOUND SEMICONDUCTORS
10-05-2020
01-24-2013
Contains the determination of dislocation etch pit density on round test slices and commercial wafers of 3-5 compound semiconductors using optical microscopy for identification and registration of dislocation etch pits.
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