Name: SEMI P24 : 1994(R2004)
Brand: SEMI

CD METROLOGY PROCEDURES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Establishes uniform procedures for metrology systems for the litho-metrology task. Also determines the performance of gauging/measurement systems for a very specific application the lithography section of integrated circuit wafer fabrication.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

Standards	Relationship
SAC GB/T 17864 : 1999	Identical

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