ASTM D 5544 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Hardcopy , PDF
07-12-2023
English
14-07-2016
This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries.
1.1This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).
1.2This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.2
1.3The values stated in SI units are to be regarded as standard. The values given in parentheses are mathematical conversions to inch-pound units that are provided for information only and are not considered standard.
1.4This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.
| Committee |
D 19
|
| DocumentType |
Test Method
|
| Pages |
9
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| ASTM E 772 : 2015 : R2021 | Standard Terminology of Solar Energy Conversion |
| ASTM E 772 : 2015 | Standard Terminology of Solar Energy Conversion |
| ASTM D 3919 : 2015 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 3370 : 1995 : REV A : R2003 : EDT 1 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM E 1184 : 2010 : R2016 | Standard Practice for Determination of Elements by Graphite Furnace Atomic Absorption Spectrometry |
| ASTM E 1184 : 2021 | Standard Practice for Determination of Elements by Graphite Furnace Atomic Absorption Spectrometry |
| ASTM D 1129 : 2003 | Standard Terminology Relating to Water |
| ASTM D 3864 : 2006 | Standard Guide for Continual On-Line Monitoring Systems for Water Analysis |
| ASTM D 5127 : 2007 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
| ASTM D 1129 : 2013 | Standard Terminology Relating to Water |
| ASTM D 5127 : 2013 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
| ASTM D 1129 : 2013 : R2020 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2012 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 3919 : 2004 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 1129 : 2006 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2003 | Standard Practice for Determination of Precision and Bias of Applicable Methods of Committee D-19 on Water |
| ASTM D 2777 : 2021 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM E 1184 : 2002 | Standard Practice for Electrothermal (Graphite Furnace) Atomic Absorption Analysis |
| ASTM D 3370 : 2010 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 2777 : 2013 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 2777 : 1998 | Standard Practice for Determination of Precision and Bias of Applicable Methods of Committee D-19 on Water |
| ASTM D 1129 : 2013 : R2020 : EDT 1 | Standard Terminology Relating to Water |
| ASTM D 3370 : 2008 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 1129 : 1999 : REV A | Standard Terminology Relating to Water |
| ASTM D 1129 : 2006 : REV A | Standard Terminology Relating to Water |
| ASTM D 1129 : 2003 : REV A | Standard Terminology Relating to Water |
| ASTM D 1129 : 2002 | Standard Terminology Relating to Water |
| ASTM E 1184 : 2010 | Standard Practice for Determination of Elements by Graphite Furnace Atomic Absorption Spectrometry |
| ASTM D 3919 : 2008 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 5127 : 2012 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
| ASTM D 1129 : 2004 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2008 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 2777 : 2006 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 3370 : 2018 | Standard Practices for Sampling Water from Flowing Process Streams |
| ASTM D 1129 : 2002 : REV A | Standard Terminology Relating to Water |
| ASTM D 3919 : 1999 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 3370 : 1976 | Standard Practices for Sampling Water |
| ASTM D 3864 : 2012 | Standard Guide for On-Line Monitoring Systems for Water Analysis |
| ASTM D 3370 : 1995 : REV A : R1999 : EDT 1 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 1129 : 2010 | Standard Terminology Relating to Water |
| ASTM D 5127 : 1999 | Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry |
| ASTM D 3370 : 2007 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 1129 : 2006 : REV A : EDT 1 | Standard Terminology Relating to Water |
| ASTM D 5127 : 2013 : R2018 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
| ASTM D 1129 : 2001 | Standard Terminology Relating to Water |
| ASTM D 1129 : 2004 : EDT 1 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2008 : EDT 1 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 3864 : 1996 : R2000 | Standard Guide for Continual On-Line Monitoring Systems for Water Analysis |
| ASTM E 1184 : 1998 | Standard Practice for Electrothermal (Graphite Furnace) Atomic Absorption Analysis |
Please Login or Create an Account so you can add users to your Multi user PDF Later.
Important note : All end users must be registered with an Account prior to user licenses being assigned.
Users cannot be edited or removed once added to your Multi user PDF.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.