ISO 13424:2013
Current
The latest, up-to-date edition.
Surface chemical analysis X-ray photoelectron spectroscopy Reporting of results of thin-film analysis
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English
23-09-2013
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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