ISO 18116:2005
Current
The latest, up-to-date edition.
Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis
PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users
French, English
22-08-2005
ISO 18116:2005 gives guidance on methods of mounting and surface treatment for a specimen about to undergo surface chemical analysis. It is intended for the analyst as an aid in understanding the specialized specimen-handling conditions required for analyses by techniques such as Auger electron spectroscopy, secondary-ion mass spectrometry, and X-ray photoelectron spectroscopy.
Committee |
ISO/TC 201/SC 2
|
DevelopmentNote |
Supersedes ISO/DIS 18116 (08/2005)
|
DocumentType |
Standard
|
Pages |
17
|
PublisherName |
International Organization for Standardization
|
Status |
Current
|
Standards | Relationship |
NF ISO 18116 : 2006 | Identical |
BS ISO 18116:2005 | Identical |
SAC GB/T 30815 : 2014 | Identical |
NEN ISO 18116 : 2005 | Identical |
AS ISO 18116-2006 | Identical |
JIS K 0154:2017 | Identical |
BS EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration |
13/30261587 DC : 0 | BS ISO 17862 - SURFACE CHEMICAL ANALYSIS - SECONDARY ION MASS SPECTROMETRY - LINEARITY OF INTENSITY SCALE IN SINGLE ION COUNTING TIME-OF-FLIGHT MASS ANALYSERS |
ISO 18117:2009 | Surface chemical analysis — Handling of specimens prior to analysis |
I.S. EN ISO 14644-10:2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013) |
ASTM E 2695 : 2009 | Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy (Withdrawn 2018) |
ISO 17862:2013 | Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers |
ISO 14701:2011 | Surface chemical analysis X-ray photoelectron spectroscopy Measurement of silicon oxide thickness |
09/30184131 DC : 0 | BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION |
BS ISO 16129:2012 | Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer |
18/30368966 DC : 0 | BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS |
BS ISO 18117:2009 | Surface chemical analysis. Handling of specimens prior to analysis |
BS ISO 16242:2011 | Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES) |
10/30212265 DC : 0 | BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS |
ISO 13424:2013 | Surface chemical analysis X-ray photoelectron spectroscopy Reporting of results of thin-film analysis |
BS ISO 14701:2011 | Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness |
DIN EN ISO 14644-10:2013-06 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
ASTM E 2735 : 2014 : REDLINE | Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments |
PD ISO/TR 14187:2011 | Surface chemical analysis. Characterization of nanostructured materials |
BS ISO 29081:2010 | Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction |
BS ISO 13424:2013 | Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis |
BS ISO 16243:2011 | Surface chemical analysis. Recording and reporting data in X-ray photoelectron spectroscopy (XPS) |
07/30172470 DC : 0 | BS ISO 18117 - SURFACE CHEMICAL ANALYSIS - HANDLING OF SPECIMENS PRIOR TO ANALYSIS |
11/30230635 DC : 0 | BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER |
ISO 10810:2010 | Surface chemical analysis X-ray photoelectron spectroscopy Guidelines for analysis |
BS ISO 17862:2013 | Surface chemical analysis. Secondary ion mass spectrometry. Linearity of intensity scale in single ion counting time-of-flight mass analysers |
ISO 16242:2011 | Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES) |
ISO 16243:2011 | Surface chemical analysis — Recording and reporting data in X-ray photoelectron spectroscopy (XPS) |
BS ISO 10810:2010 | Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis |
18/30368969 DC : 0 | BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER |
09/30191895 DC : 0 | BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS |
UNI EN ISO 14644-10 : 2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION |
ISO 29081:2010 | Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction |
EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
UNE-EN ISO 14644-10:2014 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
11/30196563 DC : 0 | BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION |
ISO 16129:2012 | Surface chemical analysis X-ray photoelectron spectroscopy Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer |
ISO/TR 14187:2011 | Surface chemical analysis Characterization of nanostructured materials |
ISO 18115:2001 | Surface chemical analysis Vocabulary |
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