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  • ISO 14644-14:2016

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    Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration

    Available format(s):  Hardcopy, PDF 1 User, PDF 3 Users, PDF 5 Users, PDF 9 Users

    Language(s):  English, French

    Published date:  14-09-2016

    Publisher:  International Organization for Standardization

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    Abstract - (Show below) - (Hide below)

    ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 146441. Particle sizes range from 0,1 m to equal to or larger than 5 m (given in ISO 146441).

    NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

    The following items are not covered by this ISO 14644-14:2016:

    - assessment of suitability with respect to biocontamination;

    - testing for suitability of decontamination agents and techniques;

    - cleanability of equipment and materials;

    - requirements on design of equipment and selection of materials;

    - physical properties of materials (e.g. electrostatic, thermal properties);

    - optimizing performance of equipment for specific process applications;

    - selection and use of statistical methods for testing;

    - protocols and requirements for local safety regulations.

    General Product Information - (Show below) - (Hide below)

    Committee ISO/TC 209
    Development Note Supersedes ISO/DIS 14644-14. (09/2016)
    Document Type Standard
    Product Note THIS STANDARD ALSO REDFERS-JIS B 9926, SEMI G67
    Publisher International Organization for Standardization
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    EN ISO 14644-15 : 2017 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
    ISO 14644-15:2017 Cleanrooms and associated controlled environments Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
    I.S. EN ISO 14644-15:2017 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017)
    BS EN ISO 14644-15 : 2017 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION

    Standards Referencing This Book - (Show below) - (Hide below)

    SAE AIR 1167 : 1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
    ISO 14644-7:2004 Cleanrooms and associated controlled environments Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    IEST RP CC002.3 : 2009 UNIDIRECTIONAL-FLOW CLEAN-AIR DEVICES
    VDI 2083-9-1 : 2006 CLEAN ROOM TECHNOLOGY - COMPATIBILITY WITH REQUIRED CLEANLINESS AND SURFACE CLEANLINESS
    IEST RP CC013.3 : 2012 CALIBRATION PROCEDURES AND GUIDELINES FOR SELECT EQUIPMENT USED IN TESTING CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
    ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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