SEMI C3.42 : 1990
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
PROVISIONAL STANDARD FOR ARGON (AR), VLSI GRADE, BULK
01-03-2005
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with advanced analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Sensitivity; Versatility; Precision; Reliability; and Availability of Equipment. Specification is specific to Argon (Ar), VLSI Grade Bulk - used in the processing and manufacture of semiconductors and advanced electronic circuits and devices. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
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